Premium
All‐Oxide Crystalline Microelectromechanical Systems: Bending the Functionalities of Transition‐Metal Oxide Thin Films
Author(s) -
Pellegrino Luca,
Biasotti Michele,
Bellingeri Emilio,
Bernini Cristina,
Siri Antonio Sergio,
Marré Daniele
Publication year - 2009
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200803360
Subject(s) - materials science , oxide , epitaxy , substrate (aquarium) , thin film , microelectromechanical systems , bending , cantilever , optoelectronics , composite material , transition metal , metal , nanotechnology , metallurgy , catalysis , layer (electronics) , biochemistry , oceanography , geology , chemistry
A crystalline all‐oxide microelectromechanical system is presented. A suspended SrTiO 3 (001) cantilever is employed as flexible substrate for the deposition of epitaxial transition‐metal oxide films. A strain generator device for oxide films is thus demonstrated, changing the conductivity of an overgrown epitaxial (La,Sr‐)‐MnO 3 film by bending downward the SrTiO 3 element with an AFM tip or a gate voltage bias.