All‐Oxide Crystalline Microelectromechanical Systems: Bending the Functionalities of Transition‐Metal Oxide Thin Films | Zendy

Pellegrino Luca | Zendy; Biasotti Michele | Zendy; Bellingeri Emilio | Zendy; Bernini Cristina | Zendy; Siri Antonio Sergio | Zendy; Marré Daniele | Zendy

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All‐Oxide Crystalline Microelectromechanical Systems: Bending the Functionalities of Transition‐Metal Oxide Thin Films

Author(s) -

Pellegrino Luca,

Biasotti Michele,

Bellingeri Emilio,

Bernini Cristina,

Siri Antonio Sergio,

Marré Daniele

Publication year - 2009

Publication title -

advanced materials

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 10.707

H-Index - 527

eISSN - 1521-4095

pISSN - 0935-9648

DOI - 10.1002/adma.200803360

Subject(s) - materials science , oxide , epitaxy , substrate (aquarium) , thin film , microelectromechanical systems , bending , cantilever , optoelectronics , composite material , transition metal , metal , nanotechnology , metallurgy , catalysis , layer (electronics) , biochemistry , oceanography , geology , chemistry

A crystalline all‐oxide microelectromechanical system is presented. A suspended SrTiO 3 (001) cantilever is employed as flexible substrate for the deposition of epitaxial transition‐metal oxide films. A strain generator device for oxide films is thus demonstrated, changing the conductivity of an overgrown epitaxial (La,Sr‐)‐MnO 3 film by bending downward the SrTiO 3 element with an AFM tip or a gate voltage bias.

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