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Low‐Cost Fabrication of Transparent Hard Replica Molds for Imprinting Lithography
Author(s) -
Kim Joohee,
Kim Mihee,
Lee Min Jung,
Lee Ji Soo,
Shin Kyusoon,
Kim Youn Sang
Publication year - 2009
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200803243
Subject(s) - replica , fabrication , materials science , imprinting (psychology) , lithography , nanotechnology , soft lithography , photolithography , polymer , optoelectronics , composite material , medicine , art , biochemistry , pathology , visual arts , gene , chemistry , alternative medicine
A new and cost‐effective replica fabrication method for transparent and hard molds used in imprinting lithography is presented. The process uses a polymer copy as a carrier. Replicated hard molds eliminate the need for direct contact between the master and the patterned polymer on the substrate, and thus reduce contamination of the master.