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Optoelectrothermic Control of Highly Integrated Polymer‐Based MEMS Applied in an Artificial Skin
Author(s) -
Richter Andreas,
Paschew Georgi
Publication year - 2009
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200802737
Subject(s) - actuator , microelectromechanical systems , materials science , nanotechnology , control (management) , scale (ratio) , artificial intelligence , polymer , computer science , composite material , physics , quantum mechanics
A large‐scale integration technology for MEMS based on the optoelectrothermic control of a temperature‐sensitive hydrogel is described and exemplified using an imaging array system, a so‐called artificial skin. The hydrogel itself acts as active functional unit, i.e., as actuator. The artificial skin comprises more than 4 000 individual actuators and provides both, visual and palpable artificial impressions of a surface.