Optoelectrothermic Control of Highly Integrated Polymer‐Based MEMS Applied in an Artificial Skin | Zendy

Richter Andreas | Zendy; Paschew Georgi | Zendy

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Optoelectrothermic Control of Highly Integrated Polymer‐Based MEMS Applied in an Artificial Skin

Author(s) -

Richter Andreas,

Paschew Georgi

Publication year - 2009

Publication title -

advanced materials

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 10.707

H-Index - 527

eISSN - 1521-4095

pISSN - 0935-9648

DOI - 10.1002/adma.200802737

Subject(s) - actuator , microelectromechanical systems , materials science , nanotechnology , control (management) , scale (ratio) , artificial intelligence , polymer , computer science , composite material , physics , quantum mechanics

A large‐scale integration technology for MEMS based on the optoelectrothermic control of a temperature‐sensitive hydrogel is described and exemplified using an imaging array system, a so‐called artificial skin. The hydrogel itself acts as active functional unit, i.e., as actuator. The artificial skin comprises more than 4 000 individual actuators and provides both, visual and palpable artificial impressions of a surface.

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