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Patterned Growth and Transfer of ZnO Micro and Nanocrystals with Size and Location Control
Author(s) -
Cole Jesse J.,
Wang Xinyu,
Knuesel Robert J.,
Jacobs Heiko O.
Publication year - 2008
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200703102
Subject(s) - materials science , nucleation , nanocrystal , photoresist , nanotechnology , facet (psychology) , epitaxy , nanometre , nanoscopic scale , optoelectronics , composite material , layer (electronics) , psychology , chemistry , social psychology , organic chemistry , personality , big five personality traits
A method to fabricate and transfer crystalline ZnO with control over location, orientation, size, and shape is reported. The process uses an oxygen plasma treatment in combination with a photoresist pattern on magnesium‐doped GaN substrates to define narrow nucleation regions and attachment points with 100 nanometer scale dimensions. Lateral epitaxial overgrowth follows nucleation to produce single‐crystalline ZnO shown in the figure.