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High‐Speed Roll‐to‐Roll Nanoimprint Lithography on Flexible Plastic Substrates
Author(s) -
Ahn Se Hyun,
Guo L. Jay
Publication year - 2008
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200702650
Subject(s) - nanoimprint lithography , materials science , roll to roll processing , polarizer , resist , lithography , optoelectronics , nanotechnology , fabrication , optics , medicine , alternative medicine , birefringence , physics , pathology , layer (electronics)
Nanograting structures in either thermally or UV curable resist are continuously fabricated on a flexible plastic substrate by a high‐speed roll‐to‐roll nanoimprint apparatus (see figure). As an example of the applications of such a roll‐to‐roll imprinting process, a high‐performance metal wire‐grid polarizer is demonstrated.