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Reversibility of the Perovskite‐to‐Fluorite Phase Transformation in Lead‐Based Thin and Ultrathin Films
Author(s) -
Brennecka Geoff L.,
Parish Chad M.,
Tuttle Bruce A.,
Brewer Luke N.,
Rodriguez Mark A.
Publication year - 2008
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200702442
Subject(s) - materials science , fluorite , stoichiometry , perovskite (structure) , permittivity , annealing (glass) , dielectric , ferroelectricity , crystallization , thin film , dielectric permittivity , phase (matter) , chemical engineering , mineralogy , optoelectronics , nanotechnology , composite material , chemistry , metallurgy , organic chemistry , engineering
As film thicknesses decrease below 50 nm, control of cation stoichiometry in Pb‐based dielectrics becomes increasingly difficult, a problem that is exacerbated by interaction with technologically important Pt bottom electrodes. Post‐crystallization annealing in a Pb‐rich atmosphere is shown to be a general technique to reversibly convert low‐permittivity Pb‐deficient fluorite into ferroelectric high‐permittivity stoichiometric perovskite with outstanding dielectric properties (see figure).