Evidence of Large Voids in Pure‐Silica‐Zeolite Low‐ k  Dielectrics Synthesized by Spin‐on of Nanoparticle Suspensions | Zendy

Eslava Salvador | Zendy; Baklanov Mikhail R. | Zendy; Neimark Alexander V. | Zendy; Iacopi Francesca | Zendy; Kirschhock Christine E. A. | Zendy; Maex Karen | Zendy; Martens Johan A. | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Premium

Evidence of Large Voids in Pure‐Silica‐Zeolite Low‐ k Dielectrics Synthesized by Spin‐on of Nanoparticle Suspensions

Author(s) -

Eslava Salvador,

Baklanov Mikhail R.,

Neimark Alexander V.,

Iacopi Francesca,

Kirschhock Christine E. A.,

Maex Karen,

Martens Johan A.

Publication year - 2008

Publication title -

advanced materials

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 10.707

H-Index - 527

eISSN - 1521-4095

pISSN - 0935-9648

DOI - 10.1002/adma.200701798

Subject(s) - materials science , dielectric , zeolite , nanometre , nanoparticle , spin (aerodynamics) , nanotechnology , chemical engineering , composite material , optoelectronics , organic chemistry , thermodynamics , physics , chemistry , engineering , catalysis

Spin‐on pure‐silica‐zeolite or Silicalite films are currently considered as outstanding low‐ k materials because of their stiffness and ultralow dielectric constant. It is shown that spin‐on Silicalite films with low k values unavoidably contain cavities tens of nanometers wide, representing a considerable challenge in their application as on‐chip interconnects.

This content is not available in your region!

Continue researching here.

Having issues? You can contact us here

Accelerating Research