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Evidence of Large Voids in Pure‐Silica‐Zeolite Low‐ k Dielectrics Synthesized by Spin‐on of Nanoparticle Suspensions
Author(s) -
Eslava Salvador,
Baklanov Mikhail R.,
Neimark Alexander V.,
Iacopi Francesca,
Kirschhock Christine E. A.,
Maex Karen,
Martens Johan A.
Publication year - 2008
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200701798
Subject(s) - materials science , dielectric , zeolite , nanometre , nanoparticle , spin (aerodynamics) , nanotechnology , chemical engineering , composite material , optoelectronics , organic chemistry , thermodynamics , physics , chemistry , engineering , catalysis
Spin‐on pure‐silica‐zeolite or Silicalite films are currently considered as outstanding low‐ k materials because of their stiffness and ultralow dielectric constant. It is shown that spin‐on Silicalite films with low k values unavoidably contain cavities tens of nanometers wide, representing a considerable challenge in their application as on‐chip interconnects.