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Polymer–Silicon Flexible Structures for Fast Chemical Vapor Detection
Author(s) -
Singamaneni S.,
McConney M. E.,
LeMieux M. C.,
Jiang H.,
Enlow J. O.,
Bunning T. J.,
Naik R. R.,
Tsukruk V. V.
Publication year - 2007
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200701419
Subject(s) - materials science , silicon , polymer , nanotechnology , optoelectronics , chemical engineering , composite material , engineering
Stimuli‐responsive microactuators controlled by the interfacial stress across the polymer/silicon interface are introduced as simple, miniature, and flexible sensing platforms for chemical vapor detection. The sensors detect water vapor with sensitivities of ± 10 parts per billion (±0.00005% relative humidity) and faster than previously recorded response times. These characteristics make the bimaterial silicon cantilevers excellent candidates for critical security and defense needs as well as for environmental monitoring.