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Generation of Various Complex Patterned Structures From a Single Ellipsoidal Dot Prepattern by Capillary Force Lithography
Author(s) -
Jung J.M.,
Stellacci F.,
Jung H.T.
Publication year - 2007
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200701310
Subject(s) - materials science , stamping , lithography , capillary action , replica , substrate (aquarium) , nanotechnology , etching (microfabrication) , pdms stamp , reactive ion etching , mold , microcontact printing , optoelectronics , composite material , fabrication , medicine , art , visual arts , oceanography , alternative medicine , layer (electronics) , pathology , metallurgy , geology
Creating many different complex structures from a single prepattern is achieved from either a master mold or stamping onto a solid substrate by patterning with a PDMS replica mold. Various metal patterns including ellipses, dots, rings, chains of dots (or rings), ribbons and wavy lines with various feature sizes can be generated from a single pattern of isolated ellipsoidal dots by simply varying the residual polymer film thickness and the reactive ion etching (RIE) time.