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Superelastic and Spring Properties of Si 3 N 4 Microcoils
Author(s) -
Cao Chuanbao,
Du Hongli,
Xu Yajie,
Zhu Hesun,
Zhang Taihua,
Yang Rong
Publication year - 2008
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200701021
Subject(s) - materials science , silicon nitride , microscale chemistry , microelectromechanical systems , spring (device) , pseudoelasticity , ceramic , nitride , coil spring , silicon , nanotechnology , composite material , optoelectronics , mechanical engineering , microstructure , mathematics education , mathematics , layer (electronics) , engineering , martensite
Silicon nitride with helical structure was prepared on a large scale by CVD. On the microscale, these coiled Si 3 N 4 ceramics still possess superelasticity and can recover their original shapes after cyclic loadings without noticeable deformations. These results suggest helical microcoils could have potential in microdevices for MEMS, motors, electromagnets, generators, and related equipment.