Epitaxial Transition Metal Oxide Nanostructures Fabricated by a Combination of AFM Lithography and Molybdenum Lift‐Off | Zendy

Suzuki N. | Zendy; Tanaka H. | Zendy; Kawai T. | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Premium

Epitaxial Transition Metal Oxide Nanostructures Fabricated by a Combination of AFM Lithography and Molybdenum Lift‐Off

Author(s) -

Suzuki N.,

Tanaka H.,

Kawai T.

Publication year - 2008

Publication title -

advanced materials

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 10.707

H-Index - 527

eISSN - 1521-4095

pISSN - 0935-9648

DOI - 10.1002/adma.200700646

Subject(s) - materials science , microfabrication , lithography , nanotechnology , nanostructure , oxide , atomic force microscopy , nanoscopic scale , thin film , epitaxy , nanolithography , transition metal , optoelectronics , fabrication , catalysis , metallurgy , medicine , biochemistry , chemistry , alternative medicine , pathology , layer (electronics)

A novel process for the microfabrication of metal oxide nanostructures is developed based on combining thin film deposition at high temperatures with the use of a Mo mask fabricated by atomic force microscopy lithography. The Mo mask is lifted‐off using H 2 O 2 solution after deposition of the oxide film. The figure shows nanoscale Fe 2.5 Mn 0.5 O 4 stripes fabricated by this process.

This content is not available in your region!

Continue researching here.

Having issues? You can contact us here

Accelerating Research