Premium
High‐Resolution Patterning of Aluminum Thin Films with a Water‐Mediated Transfer Process
Author(s) -
Lee B. H.,
Cho Y. H.,
Lee H.,
Lee K.D.,
Kim S. H.,
Sung M. M.
Publication year - 2007
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200601884
Subject(s) - materials science , substrate (aquarium) , transfer printing , adhesion , thin film , aluminium , nanotechnology , optoelectronics , chemical engineering , composite material , engineering , oceanography , geology
Water‐mediated nanotransfer printing (nTP) is based on the direct transfer of a metal thin film from a stamp to a substrate via water‐mediated surface bonding between the stamp and the substrate. The procedure can generate aluminum patterns with feature sizes as small as 60 nm (see figure). The transferred Al patterns are chemically bound to the substrate surface and, thus, exhibit strong adhesion.