Premium
Topography Mediated Patterning of Inorganic Materials by Spray Pyrolysis
Author(s) -
Beckel D.,
Briand D.,
Studart A. R.,
de Rooij N. F.,
Gauckler L. J.
Publication year - 2006
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200600718
Subject(s) - materials science , ceramic , spray pyrolysis , substrate (aquarium) , pyrolysis , aspect ratio (aeronautics) , surface micromachining , enhanced data rates for gsm evolution , nanotechnology , thin film , metal , composite material , chemical engineering , fabrication , metallurgy , telecommunications , oceanography , alternative medicine , pathology , geology , computer science , engineering , medicine
Microstructured ceramic thin films are produced by spray pyrolysis of metal salt solutions onto micromachined substrates. The ceramic structures built on the substrate result from preferential assembly of particles on the edge of the initially micromachined structures, leading to smaller lateral dimensions (1–2 μm in width) than the initial structures on the substrate (see figure). The assembly process amplifies the height of the initial structures by a factor of approximately thirty, resulting in features with an aspect ratio of three.