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Ordered Arrays of Mesoporous Microrods from Recyclable Macroporous Silicon Templates
Author(s) -
Chen X.,
Steinhart M.,
Hess C.,
Gösele U.
Publication year - 2006
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200600365
Subject(s) - template , materials science , mesoporous material , nanotechnology , microscale chemistry , silicon , rod , template method pattern , etching (microfabrication) , isotropic etching , optoelectronics , chemistry , catalysis , medicine , biochemistry , mathematics education , mathematics , alternative medicine , pathology , layer (electronics)
Ordered arrays of freestanding mesoporous microrods (see figure) are obtained from macroporous silicon templates with hydrophobized pore walls. The microrods can be removed from the template by simple mechanical lift‐off. Since no wet‐chemical etching step is involved, condensation of the rods is avoided and the template can be recycled. The hierarchical structures combine features on the nano‐ and microscale and have a well‐controlled geometry.