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Partially Oxidized Macroporous Silicon: A Three‐Dimensional Photonic Matrix for Microarray Applications
Author(s) -
Klühr M. H.,
Sauermann A.,
Elsner C. A.,
Thein K. H.,
Dertinger S. K.
Publication year - 2006
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200600093
Subject(s) - materials science , silicon , matrix (chemical analysis) , nanotechnology , photonics , optoelectronics , silicon photonics , composite material
The partial oxidation of an ordered macroporous silicon membrane (see figure and cover) with different pore‐wall thicknesses results in a regular compartmentalized structure of SiO 2 domains separated by opaque silicon walls. Experimental conditions ensure the flatness of the partially oxidized macroporous silicon. Fluorescence crossover is minimized within the photonic crystal, enabling its use as microarray support for sensitive bioanalytics, demonstrated with a DNA‐hybridization experiment.