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Employing Thin‐Film Delamination for the Formation of Shadow Masks for Nanostructure Fabrication
Author(s) -
Elbahri M.,
Rudra S. K.,
Wille S.,
Jebril S.,
Scharnberg M.,
Paretkar D.,
Kunz R.,
Rui H.,
Biswas A.,
Adelung R.
Publication year - 2006
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200502187
Subject(s) - materials science , nanowire , delamination (geology) , nanostructure , fabrication , nanotechnology , template , substrate (aquarium) , thin film , semiconductor , shadow mask , polymer , optoelectronics , composite material , optics , medicine , paleontology , oceanography , alternative medicine , pathology , biology , geology , subduction , tectonics , physics
Based on controlled thin‐film fracture and delamination , a simple method to obtain well‐aligned nanowires and nanochannels on different substrates is presented. The method is used to create templates in the form of nanoshadow masks. This allows the formation of complex nanowire structures on a variety of substrate materials, such as metals, semiconductors, and polymers. The figure shows parallel Au nanowires on Si fabricated by this approach.