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Self‐Positioning of Polymer Membranes Driven by Thermomechanically Induced Plastic Deformation
Author(s) -
Haefliger D.,
Hansen O.,
Boisen A.
Publication year - 2006
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200501687
Subject(s) - materials science , microfabrication , polymer , membrane , deformation (meteorology) , composite material , stress (linguistics) , process (computing) , viscosity , nanotechnology , fabrication , computer science , medicine , linguistics , philosophy , alternative medicine , pathology , biology , genetics , operating system
Stress in polymeric resins is tailored by a thermomechanical process. It allows for controlled self‐positioning of membranes in microdevices (see Figure). The process makes specific use of plastic deformation that results from the low viscosity of the polymer. This demonstrates that polymers offer new approaches to microfabrication that cannot be realized for common semiconductor materials without severe difficulties.