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High‐κ Dielectric Nanofilms Fabricated from Titania Nanosheets
Author(s) -
Osada M.,
Ebina Y.,
Funakubo H.,
Yokoyama S.,
Kiguchi T.,
Takada K.,
Sasaki T.
Publication year - 2006
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200501224
Subject(s) - materials science , dielectric , layer (electronics) , electrode , deposition (geology) , high κ dielectric , degradation (telecommunications) , nanotechnology , atomic layer deposition , optoelectronics , composite material , chemical engineering , electronic engineering , paleontology , chemistry , sediment , engineering , biology
2D titania nanosheets are attractive candidates as insulating materials for high‐κ dielectrics. Solution‐based layer‐by‐layer deposition combined with an atomically flat SrRuO 3 electrode produces atomically uniform multilayer nanofilms. These nanofilms exhibit high relative dielectric constants (ϵ r ) of approximately 125, even for thicknesses down to 10 nm, in contrast to size‐ induced degradation typical in high‐κ materials (see figure).