Ion‐Beam‐Assisted Lift‐Off Technique for Three‐Dimensional Micromachining of Freestanding Single‐Crystal Diamond | Zendy

Olivero P. | Zendy; Rubanov S. | Zendy; Reichart P. | Zendy; Gibson B. C. | Zendy; Huntington S. T. | Zendy; Rabeau J. | Zendy; Greentree A. D. | Zendy; Salzman J. | Zendy; Moore D. | Zendy; Jamieson D. N. | Zendy; Prawer S. | Zendy

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Ion‐Beam‐Assisted Lift‐Off Technique for Three‐Dimensional Micromachining of Freestanding Single‐Crystal Diamond

Author(s) -

Olivero P.,

Rubanov S.,

Reichart P.,

Gibson B. C.,

Huntington S. T.,

Rabeau J.,

Greentree A. D.,

Salzman J.,

Moore D.,

Jamieson D. N.,

Prawer S.

Publication year - 2005

Publication title -

advanced materials

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 10.707

H-Index - 527

eISSN - 1521-4095

pISSN - 0935-9648

DOI - 10.1002/adma.200500752

Subject(s) - materials science , surface micromachining , diamond , focused ion beam , microstructure , fabrication , ion beam , single crystal , diamond cubic , machining , optoelectronics , ion , nanotechnology , beam (structure) , optics , composite material , metallurgy , crystallography , medicine , chemistry , alternative medicine , physics , pathology , quantum mechanics

The machining of 3D microstructures in single‐crystal artificial diamond is demonstrated with a focused ion beam (FIB)‐assisted lift‐off technique. A sacrificial buried layer is created with MeV ion implantation, followed by patterning of selected regions with the FIB technique; the sacrificial layer is then selectively etched, leaving 3D free‐standing microstructures in the bulk (see Figure). Using this fabrication technique, light waveguiding through a microstructure in single‐crystal diamond is demonstrated for the first time.

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