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Ion‐Beam‐Assisted Lift‐Off Technique for Three‐Dimensional Micromachining of Freestanding Single‐Crystal Diamond
Author(s) -
Olivero P.,
Rubanov S.,
Reichart P.,
Gibson B. C.,
Huntington S. T.,
Rabeau J.,
Greentree A. D.,
Salzman J.,
Moore D.,
Jamieson D. N.,
Prawer S.
Publication year - 2005
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200500752
Subject(s) - materials science , surface micromachining , diamond , focused ion beam , microstructure , fabrication , ion beam , single crystal , diamond cubic , machining , optoelectronics , ion , nanotechnology , beam (structure) , optics , composite material , metallurgy , crystallography , medicine , chemistry , alternative medicine , physics , pathology , quantum mechanics
The machining of 3D microstructures in single‐crystal artificial diamond is demonstrated with a focused ion beam (FIB)‐assisted lift‐off technique. A sacrificial buried layer is created with MeV ion implantation, followed by patterning of selected regions with the FIB technique; the sacrificial layer is then selectively etched, leaving 3D free‐standing microstructures in the bulk (see Figure). Using this fabrication technique, light waveguiding through a microstructure in single‐crystal diamond is demonstrated for the first time.