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SrZrO 3 Nanopatterning Using Self‐Organized SrRuO 3 as a Template
Author(s) -
Vasco E.,
Karthäuser S.,
Dittmann R.,
He J.Q.,
Jia C.L.,
Szot K.,
Waser R.
Publication year - 2005
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200400718
Subject(s) - materials science , vicinal , epitaxy , nanoscopic scale , nanotechnology , nanowire , pulsed laser deposition , template , dielectric , thin film , optoelectronics , chemistry , organic chemistry , layer (electronics)
Nanopatterned rippled films (see Figure) are produced by epitaxial growth of pulsed‐laser deposited SrRuO 3 on phototreated surfaces of vicinal SrTiO 3 by self‐organization in a step‐flow inhibited regime. The as‐deposited SrRuO 3 films are used as nanoscale templates to fabricate arrays of epitaxial SrZrO 3 dielectric nanowires.