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Patterned Microstructures of Porous Silicon by Dry‐Removal Soft Lithography
Author(s) -
Sirbuly D.J.,
Lowman G.M.,
Scott B.,
Stucky G.D.,
Buratto S.K.
Publication year - 2003
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200390031
Subject(s) - materials science , soft lithography , lithography , substrate (aquarium) , silicon , porous silicon , transfer printing , porosity , microstructure , nanotechnology , polymer , composite material , optoelectronics , fabrication , medicine , oceanography , alternative medicine , pathology , geology
A new procedure to directly pattern a luminescent porous silicon substrate by dry‐removal soft lithography is outlined. The ability to transfer a removed microstructure of porous silicon to a free‐standing flexible polymer film is also demonstrated, and by removing strips in orthogonal directions, an array of PSi pillars is produced (see Figure).