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Controlling Dielectric and Optical Properties of Ordered Mesoporous Organosilicate Films
Author(s) -
Balkenende A.R.,
de Theije F.K.,
Kriege J.C.K.
Publication year - 2003
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200390028
Subject(s) - materials science , dielectric , refractive index , fabrication , mesoporous material , hybrid material , relative humidity , silicate , mesoporous silica , chemical engineering , high refractive index polymer , characterization (materials science) , fraction (chemistry) , nanotechnology , optoelectronics , organic chemistry , medicine , chemistry , alternative medicine , physics , pathology , engineering , thermodynamics , catalysis
Mesoporous hybrid inorganic–organic silicate films with pendant methyl groups are prepared. With a high organic fraction, these films are hydrophobic, which is important in the fabrication of low‐k dielectrics. The refractive index of layers with smaller organic fraction can be switched reversibly over a large refractive index interval by varying the relative humidity (see Figure).