Premium
Stamps for Submicrometer Soft Lithography Fabricated by Capillary Force Lithography
Author(s) -
Bruinink C. M.,
Péter M.,
de Boer M.,
Kuipers L.,
Huskens J.,
Reinhoudt D. N.
Publication year - 2004
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200306523
Subject(s) - microcontact printing , materials science , lithography , soft lithography , pdms stamp , nanotechnology , fabrication , etching (microfabrication) , photolithography , next generation lithography , replica , micrometer , capillary action , molding (decorative) , isotropic etching , template , resist , optoelectronics , electron beam lithography , optics , composite material , art , visual arts , physics , pathology , layer (electronics) , medicine , alternative medicine
A convenient, inexpensive technique for fabrication of stamps for submicrometer soft lithography from masters with micrometer‐size features is presented. Templates fabricated by capillary‐force lithography are robust against replica molding of stamps. The Figure shows the resulting metal structure after employing such a second‐generation stamp in microcontact printing of octadecanethiol and subsequent wet chemical etching of the underlying gold.