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Formation of TiO 2 and ZrO 2 Nanotubes Using Atomic Layer Deposition with Ultraprecise Control of the Wall Thickness
Author(s) -
Shin H.,
Jeong D.K.,
Lee J.,
Sung M. M.,
Kim J.
Publication year - 2004
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200306296
Subject(s) - materials science , atomic layer deposition , nanoporous , layer (electronics) , polycarbonate , angstrom , deposition (geology) , nanotechnology , template , chemical engineering , membrane , composite material , crystallography , paleontology , chemistry , genetics , sediment , engineering , biology
Nanotubes of TiO 2 and ZrO 2 (see Figure) with diameters of ca. 30–200 nm have been successfully fabricated by atomic layer deposition in a one‐step process utilizing nanoporous membranes (commercial polycarbonate filters) as templates. Sub‐angstrom wall thickness control and high aspect ratios can be achieved by this method.
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