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Room‐Temperature Nanoimprint Lithography of Non‐thermoplastic Organic Films
Author(s) -
Pisignano D.,
Persano L.,
Raganato M. F.,
Visconti P.,
Cingolani R.,
Barbarella G.,
Favaretto L.,
Gigli G.
Publication year - 2004
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200305832
Subject(s) - nanoimprint lithography , materials science , thermoplastic , molar mass , lithography , organic semiconductor , optoelectronics , polymer , nanotechnology , grating , composite material , fabrication , medicine , alternative medicine , pathology
A grating resolution of up to 200 nm is achieved using room‐temperature nanoimprint lithography on several different light‐emitting low‐molar‐mass organic semiconductors, without any degradation of the active materials after patterning (see Figure). This could be the only process that permits the transfer of a height profile to films of this very important class of low‐molar‐mass conjugated molecules with poor thermoplastic behavior.