Room‐Temperature Nanoimprint Lithography of Non‐thermoplastic Organic Films | Zendy

Pisignano D. | Zendy; Persano L. | Zendy; Raganato M. F. | Zendy; Visconti P. | Zendy; Cingolani R. | Zendy; Barbarella G. | Zendy; Favaretto L. | Zendy; Gigli G. | Zendy

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Room‐Temperature Nanoimprint Lithography of Non‐thermoplastic Organic Films

Author(s) -

Pisignano D.,

Persano L.,

Raganato M. F.,

Visconti P.,

Cingolani R.,

Barbarella G.,

Favaretto L.,

Gigli G.

Publication year - 2004

Publication title -

advanced materials

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 10.707

H-Index - 527

eISSN - 1521-4095

pISSN - 0935-9648

DOI - 10.1002/adma.200305832

Subject(s) - nanoimprint lithography , materials science , thermoplastic , molar mass , lithography , organic semiconductor , optoelectronics , polymer , nanotechnology , grating , composite material , fabrication , medicine , alternative medicine , pathology

A grating resolution of up to 200 nm is achieved using room‐temperature nanoimprint lithography on several different light‐emitting low‐molar‐mass organic semiconductors, without any degradation of the active materials after patterning (see Figure). This could be the only process that permits the transfer of a height profile to films of this very important class of low‐molar‐mass conjugated molecules with poor thermoplastic behavior.

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