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Fabrication of Highly Conductive 12CaO·7Al 2 O 3 Thin Films Encaging Hydride Ions by Proton Implantation
Author(s) -
Miyakawa M.,
Hayashi K.,
Hirano M.,
Toda Y.,
Kamiya T.,
Hosono H.
Publication year - 2003
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.200304925
Subject(s) - materials science , fluence , fabrication , proton , optoelectronics , irradiation , thin film , electrical conductor , ion , semiconductor , oxide , conductivity , hydride , insulator (electricity) , doping , proton conductor , nanotechnology , composite material , metal , electrode , chemistry , organic chemistry , electrolyte , quantum mechanics , nuclear physics , medicine , physics , alternative medicine , pathology , metallurgy
Thin films of a new transparent oxide semiconductor 12CaO·7Al 2 O 3 consisting of subnanometer‐sized cages (see Figure inset) have been fabricated, and their light‐induced insulator–conductor conversion is described. Proton implantation at a fluence of 1 × 10 18 cm –2 followed by UV‐light irradiation increases the electrical conductivity by more than eleven orders of magnitude to the largest value ∼ 10 S cm –1 (see Figure). The conducting state is erasable by heating.