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Additive fabrication of integrated ferroelectric thin‐film capacitors using self‐assembled organic thin‐film templates
Author(s) -
Jeon Noo Li,
Clem Paul,
Jung Duk Young,
Lin Wenbin,
Girolami Gregory S.,
Payne David A.,
Nuzzo Ralph G.
Publication year - 1997
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.19970091107
Subject(s) - materials science , fabrication , thin film , ferroelectricity , capacitor , nanotechnology , template , lithography , optoelectronics , dielectric , voltage , electrical engineering , medicine , alternative medicine , engineering , pathology
The utility of non‐lithographic patterning methods for the integrated fabrication of prototypical thin‐film‐device architectures is demonstrated. An additive patterning technique based on printed organic thin films is used to fabricate ferroelectric capacitors consisting of a Pt/PZT/Pt thin‐film structure, where PZT is lead zirconium titanate. This type of material, which has applications in high performance information storage, micromachine, and thermal imaging devices, cannot be created using the conventional fine‐scale patterning methods.