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Fabrication of glassy carbon microstructures by pyrolysis of microfabricated polymeric precursors
Author(s) -
Schueller Olivier J. A.,
Brittain Scott T.,
Whitesides George M.
Publication year - 1997
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.19970090604
Subject(s) - materials science , pyrolysis , microstructure , fabrication , carbon fibers , glassy carbon , polymer , nanotechnology , microreactor , microelectromechanical systems , chemical engineering , yield (engineering) , composite material , electrochemistry , organic chemistry , catalysis , electrode , medicine , cyclic voltammetry , chemistry , alternative medicine , pathology , composite number , engineering
High‐carbin mcirostructures as components in microelectromechanical structures and microreactors are of particular interest because their mechanical, electrical, and chemical properties can be controlled by the temperature of preparation. The range of electrical properties is especially impressive. A method of fabricating microstructures of glassy carbon and other high‐carbon solids is presented, based on micromolding of polymers to form precursors to these structures and pyrolysis to yield the carbon solids. The advantages of the technique are discussed.