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Lithographic molding: A convenient route to structures with sub‐micrometer dimensions **
Author(s) -
Wilbur James L.,
Kim Enoch,
Xia Younan,
Whitesides George M.
Publication year - 1995
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.19950070710
Subject(s) - microcontact printing , materials science , photolithography , lithography , fabrication , micrometer , nanotechnology , elastomer , molding (decorative) , photomask , resist , optoelectronics , mechanical engineering , composite material , engineering , medicine , alternative medicine , pathology , layer (electronics)
Elastomeric stamps with submicrometer features for use in the recently reported microcontact printing procedure are produced without the need for routine access to cleanrooms. The new technique is therefore an alternative to the use of photolithography for the fabrication of the stamps, simplifying the technology required to generate structures with sub‐micrometer dimensions (e.g. see Fig.).