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CVD routes to titanium disulfide films
Author(s) -
Lewkebandara T. Suren,
Winter Charles H.
Publication year - 1994
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.19940060313
Subject(s) - materials science , chemical vapor deposition , lithium (medication) , nanotechnology , solid state , stoichiometry , disulfide bond , chemical engineering , engineering physics , organic chemistry , medicine , biochemistry , chemistry , endocrinology , engineering
Tis 2 films, used in lithium batteries , can be prepared by a variety of methods, including several chemical vapor deposition (CVD) routs. The available CVD routes are briefly reviewed, together with the techniques used to check that the resulting films meet the stringent requirements of the lithium battery industry, for example. Solid‐state lithium batteries used in heart pacemakers require TiS 2 thinfilms of high purity, denese packing, exact stoichiometry, and a preferred crystallographic orientation, all of which can be achived by CVD methods.