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Chemical vapor deposition of silicon carbide powders using pulsed CO 2 Lasers
Author(s) -
Scholz Malte,
Fuß Werner,
Kompa KarlLudwig
Publication year - 1993
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.19930050106
Subject(s) - materials science , tetramethylsilane , silicon carbide , ceramic , chemical vapor deposition , laser , crystallite , polymer , pyrolysis , composite material , chemical engineering , nanotechnology , metallurgy , optics , organic chemistry , chemistry , physics , engineering
A carbosilane polymer which survives temperatures up to 2000°C is reported. It deposits on the surface of SiC particulates which form during the laser pyrolysis of tetramethylsilane, and has possible applications as a sintering aid for SiC or in reducing brittleness in ceramic composites. Powders consisting of 8–10 nm SiC crystallites embedded in the carbosilane polymer are produced in the plasma formed by a focused CO 2 laser.