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Silicon micro‐velcro
Author(s) -
Reed Michael L.,
Han Hongtao,
Weiss Lee E.
Publication year - 1992
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.19920040111
Subject(s) - materials science , surface micromachining , silicon , nanotechnology , bulk micromachining , biocompatible material , microstructure , anodic bonding , adhesive , optoelectronics , biomedical engineering , composite material , fabrication , medicine , alternative medicine , pathology , layer (electronics)
Silicon micromachining technology has been employed to fabricate dense, regular arrays of microstructures which act as mechanical adhesives. Structures such as that shown in the figure have potential applications in the biocompatible bonding of human tissue during surgery, their barb‐like nature preventing retraction. A second approach, using mating structures, provides precision self ‐ alligning , room‐temperature bonding with potential in the mounting of integrated circuit chips.