Two‐step generation of aluminum microstructures on laser‐generated pd pre‐nucleation patterns using thermal cvd from (trimethylamine)trihydridoaluminum | Zendy

Gottsleben Oliver | Zendy; Stuke Michael | Zendy; Roesky Herbert W. | Zendy

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Two‐step generation of aluminum microstructures on laser‐generated pd pre‐nucleation patterns using thermal cvd from (trimethylamine)trihydridoaluminum

Author(s) -

Gottsleben Oliver,

Stuke Michael,

Roesky Herbert W.

Publication year - 1991

Publication title -

advanced materials

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 10.707

H-Index - 527

eISSN - 1521-4095

pISSN - 0935-9648

DOI - 10.1002/adma.19910030407

Subject(s) - materials science , palladium , nucleation , aluminium , trimethylamine , catalysis , microstructure , nanometre , nanotechnology , chemical engineering , laser , metallurgy , composite material , optics , organic chemistry , physics , chemistry , engineering

Communication: Aluminium microstructures, important in electronics packaging applications , can be efficiently produced using a new two‐step method which involves thermal CVD from (trimethylamine)trihydridoaluminum onto lasergenerated spatially selective prenucleation patterns of a palladium catalyst. Interestingly, the aluminum continues to grow to heights of more than a few nanometers even after it has completely covered the palladium catalyst.

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