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Two‐step generation of aluminum microstructures on laser‐generated pd pre‐nucleation patterns using thermal cvd from (trimethylamine)trihydridoaluminum
Author(s) -
Gottsleben Oliver,
Stuke Michael,
Roesky Herbert W.
Publication year - 1991
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.19910030407
Subject(s) - materials science , palladium , nucleation , aluminium , trimethylamine , catalysis , microstructure , nanometre , nanotechnology , chemical engineering , laser , metallurgy , composite material , optics , organic chemistry , physics , chemistry , engineering
Communication: Aluminium microstructures, important in electronics packaging applications , can be efficiently produced using a new two‐step method which involves thermal CVD from (trimethylamine)trihydridoaluminum onto lasergenerated spatially selective prenucleation patterns of a palladium catalyst. Interestingly, the aluminum continues to grow to heights of more than a few nanometers even after it has completely covered the palladium catalyst.