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Plasma processing of surfaces
Author(s) -
Möhl Wolfgang
Publication year - 1990
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.19900020908
Subject(s) - materials science , plasma , plasma processing , surface modification , nanotechnology , process engineering , engineering physics , chemical engineering , engineering , physics , quantum mechanics
Plasma techniques are employed in microlithography and in other surface modification methods. The increasing need for sources of “clean” plasma, uncontaminated with metal, has led to the development of new technology which outperforms the traditional Kaufman‐type source. The techniques are compared and some of the possible applications examined.