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Diamond thin film technology I. Diamond deposition
Author(s) -
Bachmann Peter K.
Publication year - 1990
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.19900020410
Subject(s) - diamond , materials science , abrasive , thin film , lithography , nanotechnology , engineering physics , optoelectronics , composite material , engineering
Diamond thin film technology I. In the first article of a regular series Peter Bachmann of the Philips Research Labs in Aachen, FRG, describes the different methods used to deposit diamond in films (see figure). Diamond in this form has many applications e.g. as an abrasive material, in lithography masks, microwave windows, in heat sinks, and in LEDs to name just a few.