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Surface modification with lasers
Author(s) -
Comita Paul B.
Publication year - 1990
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.19900020204
Subject(s) - microelectronics , materials science , laser , surface modification , nanotechnology , surface (topology) , materials processing , chemical engineering , optics , process engineering , physics , geometry , mathematics , engineering
Laser‐induced processing has been widely exploited in the microelectronics industry, to produce deposits with well‐controlled chemical composition, feature size, and morphology. A brief survey of the most commonly used techniques for laser patterning of materials on surfaces is presented. The issues which are key to continued progress in the field of surface modification with lasers are examined, including laser heating of surfaces, the role of mass transport in the kinetics of deposit growth, the study of the surface reactions involved in laserinduced processes, and some aspects of materials properties which are important in surface modification techniques.