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Handbook of thin‐film deposition processes and techniques. Edited by K. K. Schuegraf . Noyes Publications, Park Ridge, N.J., USA 1988. xvii, 413 pp., bound, US $ 72.–ISBN 0‐8155‐1153‐1
Author(s) -
von Känel Hans
Publication year - 1989
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.19890010614
Subject(s) - ridge , citation , engineering physics , materials science , library science , art history , physics , humanities , nanotechnology , art , computer science , geology , paleontology