Premium
Microengineering Pressure Sensor Active Layers for Improved Performance
Author(s) -
Ruth Sara Rachel Arussy,
Feig Vivian Rachel,
Tran Helen,
Bao Zhenan
Publication year - 2020
Publication title -
advanced functional materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 6.069
H-Index - 322
eISSN - 1616-3028
pISSN - 1616-301X
DOI - 10.1002/adfm.202003491
Subject(s) - materials science , fabrication , capacitive sensing , piezoresistive effect , pressure sensor , active layer , resistive touchscreen , nanotechnology , layer (electronics) , optoelectronics , acoustics , computer science , mechanical engineering , engineering , medicine , alternative medicine , thin film transistor , physics , pathology , computer vision , operating system
Pressure sensors play an integral role in a wide range of applications, such as soft robotics and health monitoring. In order to meet this demand, many groups microengineer the active layer—the layer that deforms under pressure and dictates changes in the output signal—of capacitive, resistive/piezoresistive, piezoelectric, and triboelectric pressure sensors in order to improve sensor performance. Geometric microengineering of the active layer has been shown to improve performance parameters such as sensitivity, dynamic range, limit of detection, and response and relaxation times. There are a wide range of implemented designs, including microdomes, micropyramids, lines or microridges, papillae, microspheres, micropores, and microcylinders, each offering different advantages for a particular application. It is important to compare the techniques by which the microengineered active layers are designed and fabricated as they may provide additional insights on compatibility and sensing range limits. To evaluate each fabrication method, it is critical to take into account the active layer uniformity, ease of fabrication, shape and size versatility and tunability, and scalability of both the device and the fabrication process. By better understanding how microengineering techniques and design compares, pressure sensors can be targetedly designed and implemented.