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A Highly Sensitive Force Sensor with Fast Response Based on Interlocked Arrays of Indium Tin Oxide Nanosprings toward Human Tactile Perception
Author(s) -
Chun Sungwoo,
Choi Il Yong,
Son Wonkyeong,
Bae Gi Yoon,
Lee Eun Jae,
Kwon Hyunah,
Jung Jaimyun,
Kim Hyoung Seop,
Kim Jong Kyu,
Park Wanjun
Publication year - 2018
Publication title -
advanced functional materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 6.069
H-Index - 322
eISSN - 1616-3028
pISSN - 1616-301X
DOI - 10.1002/adfm.201804132
Subject(s) - materials science , polyethylene naphthalate , tactile sensor , indium tin oxide , nanotechnology , millisecond , substrate (aquarium) , optoelectronics , tactile perception , computer science , perception , layer (electronics) , artificial intelligence , neuroscience , biology , oceanography , physics , astronomy , geology , robot
Development of a sensor for recognizing tactile feeling is essential for realizing artificial systems that can perform human tactile functions for various applications. For achieving the capability of human tactile sensation, highly sensitive responses are required not only to static pressures but also to dynamic high‐frequency vibrations. Here, a highly sensitive force sensor based on interlocked arrays of vertically aligned indium tin oxide (ITO) nanospring structures fabricated on a flexible polyethylene naphthalate substrate is presented. The combination of rigid ITO on the flexible substrate, its unique nanoscale spring‐like geometry, and the interlocking configuration results in sensitive responses to both static and dynamic pressures with a sub‐millisecond response time over wide pressure and frequency ranges appropriate for human tactile perception. Consequently, the sensor is capable of classifying eight fabrics possessing complex patterns with 99.8% accuracy. In addition, a flexible 14 × 14 force sensor matrix array is demonstrated, thus demonstrating the integration capability.