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Wafer‐Scale Single‐Crystalline Ferroelectric Perovskite Nanorod Arrays
Author(s) -
Kang Min Gyu,
Lee SeulYi,
Maurya Deepam,
Winkler Christopher,
Song HyunCheol,
Moore Robert B.,
Sanghadasa Mohan,
Priya Shashank
Publication year - 2017
Publication title -
advanced functional materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 6.069
H-Index - 322
eISSN - 1616-3028
pISSN - 1616-301X
DOI - 10.1002/adfm.201701542
Subject(s) - materials science , nanorod , ferroelectricity , wafer , nanotechnology , nanostructure , piezoelectricity , nanoscopic scale , silicon , thin film , perovskite (structure) , optoelectronics , composite material , dielectric , chemical engineering , engineering
1D ferroelectric nanostructures are promising for enhanced ferroelectric and piezoelectric performance on the nanoscale, however, their synthesis at the wafer scale using industrially compatible processes is challenging. In order to advance the nanostructure‐based electronics, it is imperative to develop a silicon‐compatible growth technique yielding high volumetric density and an ordered arrangement. Here, a major breakthrough is provided in addressing this need and ordered and close‐packed single crystalline ferroelectric nanorod arrays, of composition PbZr 0.52 Ti 0.48 O 3 (PZT), grown on commercial grade 3 in. silicon wafer are demonstrated. PZT nanorods exhibit enhanced piezoelectric and ferroelectric performance compared to thin films of similar dimensions. Sandwich structured architecture utilizing 1D PZT nanorod arrays and 2D reduced graphene oxide thin film electrodes is fabricated to provide electrical connection. Combined, these results offer a clear pathway toward integration of ferroelectric nanodevices with commercial silicon electronics.