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Declamped Piezoelectric Coefficients in Patterned 70/30 Lead Magnesium Niobate–Lead Titanate Thin Films
Author(s) -
Keech Ryan,
Ye Linghan,
Bosse James L.,
Esteves Giovanni,
Guerrier Jonathon,
Jones Jacob L.,
Kuroda Marcelo A.,
Huey Bryan D.,
TrolierMcKinstry Susan
Publication year - 2017
Publication title -
advanced functional materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 6.069
H-Index - 322
eISSN - 1616-3028
pISSN - 1616-301X
DOI - 10.1002/adfm.201605014
Subject(s) - materials science , piezoelectricity , piezoelectric coefficient , lead titanate , thin film , piezoresponse force microscopy , diffraction , substrate (aquarium) , composite material , ferroelectricity , dielectric , nanotechnology , optoelectronics , optics , oceanography , physics , geology
Lateral subdivision of blanket piezoelectric thin films increases the functional properties through both increased domain wall mobility and declamping of the intrinsic response. This work presents the local effects of substrate declamping on the piezoelectric coefficient d 33,f of 300 nm thick, rhombohedral, {001}‐oriented lead magnesium niobate–lead titanate thin films at the 70/30 composition (70PMN–30PT). Films grown by chemical solution deposition on platinized Si substrates are patterned into strip structures ranging from 0.75 to 9 µm in width. The longitudinal piezoelectric coefficient, d 33,f , is interrogated as a function of position across the patterned structures by three approaches: finite element modeling, piezoresponse force microscopy, and nanoprobe synchrotron X‐ray diffraction. It is found that d 33,f increases from the clamped value of 40–50 to ≈160 pm V −1 at the free sidewall under 200 kV cm −1 excitation. The sidewalls partially declamp the piezoelectric response 500–600 nm into the patterned structure, raising the piezoelectric response at the center of features with lateral dimensions less than 1 µm (3:1 width to thickness aspect ratio). The normalized data from all three methods are in excellent agreement, with quantitative differences providing insight to the field dependence of the piezoelectric coefficient and its declamping behavior.