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Role of Molecular Sieves in the CVD Synthesis of Large‐Area 2D MoTe 2
Author(s) -
Zhou Lin,
Xu Kai,
Zubair Ahmad,
Zhang Xu,
Ouyang Fangping,
Palacios Tomás,
Dresselhaus Mildred S.,
Li Yongfeng,
Kong Jing
Publication year - 2017
Publication title -
advanced functional materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 6.069
H-Index - 322
eISSN - 1616-3028
pISSN - 1616-301X
DOI - 10.1002/adfm.201603491
Subject(s) - molecular sieve , materials science , chemical vapor deposition , substrate (aquarium) , telluride , silicon , layer (electronics) , tellurium , nanotechnology , chemical engineering , deposition (geology) , catalysis , adsorption , phase (matter) , optoelectronics , chemistry , organic chemistry , metallurgy , paleontology , oceanography , sediment , geology , engineering , biology
The synthesis of high‐quality 2D MoTe 2 with a desired phase on SiO 2 /Si substrate is crucial to its diverse applications. A side reaction of Te with the substrate Si leading to SiTe and Si 2 Te 3 tends to happen during growth, resulting in the failure to obtain MoTe 2 . It has been found that molecular sieves can adsorb the silicon telluride byproducts and eliminate the influence of the side reaction during the chemical vapor deposition synthesis of MoTe 2 . With the help of molecular sieves, few‐layer 1T′ MoTe 2 can be grown from the MoO x precursor. Pure 1T′ MoTe 2 and 2H MoTe 2 regions in centimeter‐sized areas synthesized on the same piece of SiO 2 /Si substrate can be obtained by using an overlapped geometry. The strategy provides a new method to controllably synthesize MoTe 2 with desired phases and can be generalizable to the synthesis of other tellurium‐based layered materials.