Premium
Materials and Wireless Microfluidic Systems for Electronics Capable of Chemical Dissolution on Demand
Author(s) -
Lee Chi Hwan,
Jeong JaeWoong,
Liu Yuhao,
Zhang Yihui,
Shi Yan,
Kang SeungKyun,
Kim Jeonghyun,
Kim Jae Soon,
Lee Na Yeon,
Kim Bong Hoon,
Jang KyungIn,
Yin Lan,
Kim Min Ku,
Banks Anthony,
Paik Ungyu,
Huang Yonggang,
Rogers John A.
Publication year - 2015
Publication title -
advanced functional materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 6.069
H-Index - 322
eISSN - 1616-3028
pISSN - 1616-301X
DOI - 10.1002/adfm.201403573
Subject(s) - materials science , electronics , microelectronics , nanotechnology , microfluidics , silicon , etching (microfabrication) , transistor , isotropic etching , monocrystalline silicon , silicon dioxide , optoelectronics , electrical engineering , layer (electronics) , engineering , metallurgy , voltage
Electronics that are capable of destroying themselves, on demand and in a harmless way, might provide the ultimate form of data security. This paper presents materials and device architectures for triggered destruction of conventional microelectronic systems by means of microfluidic chemical etching of the constituent materials, including silicon, silicon dioxide, and metals (e.g., aluminum). Demonstrations in an array of home‐built metal‐oxide‐semiconductor field‐effect transistors that exploit ultrathin sheets of monocrystalline silicon and in radio‐frequency identification devices illustrate the utility of the approaches.