Premium
Silicon Micromachining: Electrochemical Micromachining as an Enabling Technology for Advanced Silicon Microstructuring (Adv. Funct. Mater. 6/2012)
Author(s) -
Bassu Margherita,
Surdo Salvatore,
Strambini Lucanos Marsilio,
Barillaro Giuseppe
Publication year - 2012
Publication title -
advanced functional materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 6.069
H-Index - 322
eISSN - 1616-3028
pISSN - 1616-301X
DOI - 10.1002/adfm.201290036
Subject(s) - surface micromachining , materials science , silicon , bulk micromachining , micrometer , microsystem , nanotechnology , etching (microfabrication) , fabrication , optoelectronics , optics , medicine , alternative medicine , pathology , layer (electronics) , physics
On page 1222 , Giuseppe Barillaro and co‐workers demonstrate that electrochemical micromachining (ECM) technology allows the fabrication of silicon microstructures with various shapes and silicon microsystems with high complexity to be performed in any research laboratory with sub‐micrometer accuracy up to the highest aspect ratio values using dynamical real‐time control of the etching anisotropy. False‐color scanning electron microscopy (SEM) images of a silicon microgripper fabricated using ECM technology are acquired at different magnifications.