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Controlled Polarizability of One‐Nanometer‐Thick Oxide Nanosheets for Tailored, High‐ κ Nanodielectrics
Author(s) -
Osada Minoru,
Takanashi Genki,
Li BaoWen,
Akatsuka Kosho,
Ebina Yasuo,
Ono Kanta,
Funakubo Hiroshi,
Takada Kazunori,
Sasaki Takayoshi
Publication year - 2011
Publication title -
advanced functional materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 6.069
H-Index - 322
eISSN - 1616-3028
pISSN - 1616-301X
DOI - 10.1002/adfm.201100580
Subject(s) - materials science , polarizability , dielectric , microelectronics , oxide , fabrication , nanometre , high κ dielectric , nanotechnology , context (archaeology) , optoelectronics , engineering physics , composite material , medicine , paleontology , chemistry , alternative medicine , organic chemistry , pathology , molecule , engineering , metallurgy , biology
An important challenge in current microelectronics research is the development of techniques for making smaller, higher‐performance electronic components. In this context, the fabrication and integration of ultrathin high‐ κ dielectrics with good insulating properties is an important issue. Here, we report on a rational approach to produce high‐performance nanodielectrics using one‐nanometer‐thick oxide nanosheets as a building block. In titano niobate nanosheets (TiNbO 5 , Ti 2 NbO 7 , Ti 5 NbO 14 ), the octahedral distortion inherent to site‐engineering by Nb incorporation results in a giant molecular polarizability, and their multilayer nanofilms exhibit a high dielectric constant (160–320), the largest value seen so far in high‐ κ nanofilms with thickness down to 10 nm. Furthermore, these superior high‐ κ properties are fairly temperature‐independent with low leakage‐current density (<10 −7 A cm −2 ). This work may provide a new recipe for designing nanodielectrics desirable for practical high‐ κ devices.