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Wafer‐Level Self‐Organized Copolymer Templates for Nanolithography with Sub‐50 nm Feature and Spatial Resolutions
Author(s) -
Krishnamoorthy Sivashankar,
Manipaddy Krishna Kumar,
Yap Fung Ling
Publication year - 2011
Publication title -
advanced functional materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 6.069
H-Index - 322
eISSN - 1616-3028
pISSN - 1616-301X
DOI - 10.1002/adfm.201002380
Subject(s) - template , materials science , wafer , nanolithography , nanopillar , lithography , nanotechnology , fabrication , resist , optoelectronics , nanostructure , layer (electronics) , medicine , alternative medicine , pathology
Abstract Robust lithographic templates, with sub‐50 nm feature and spatial resolutions, that exhibit high patterning integrity across a full‐wafer are demonstrated using self‐organized copolymer reverse micelles on 100 mm Si wafers. A variation of less than 5% in the feature size and periodicity of polymeric templates across the entire wafer is achieved simply by controlling the spin‐coating process. Lithographic pattern transfer using these templates yields Si nanopillar arrays spanning the entire wafer surface and exhibiting high uniformity inherited from the original templates. The variation in geometric characteristics of the pillar arrays across the full‐wafer surface is validated to be less than 5% using reflectance spectroscopy. The physical basis of the change in reflectance with respect to sub‐10 nm variations in geometric parameters of pillar arrays is shown by theoretical modelling and simulations. Successful fabrication of highly durable TiO 2 masks for nanolithography with sub‐50 nm feature width and spatial resolutions is achieved through highly controlled vapour phase processing of reverse micelle templates. This allows lithographic pattern‐transfer of organic templates with a feature thickness and separation of less than 10 nm, which is otherwise not possible through other approaches reported in literature.