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Nanopatterning by an Integrated Process Combining Capillary Force Lithography and Microcontact Printing
Author(s) -
Duan Xuexin,
Zhao Yiping,
Perl András,
Berenschot Erwin,
Reinhoudt David N.,
Huskens Jurriaan
Publication year - 2010
Publication title -
advanced functional materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 6.069
H-Index - 322
eISSN - 1616-3028
pISSN - 1616-301X
DOI - 10.1002/adfm.200901700
Subject(s) - microcontact printing , polydimethylsiloxane , materials science , pdms stamp , lithography , substrate (aquarium) , polymer , nanotechnology , capillary action , evaporation , photolithography , soft lithography , optoelectronics , composite material , fabrication , alternative medicine , physics , medicine , oceanography , pathology , geology , thermodynamics
A novel nanopatterning process was developed by combining capillary force lithography (CFL) and microcontact printing (µCP). Flat polydimethylsiloxane (PDMS) was used as the substrate in CFL, and after chemical functionalization, as the stamp in µCP, which increased the resolution of both methods. The polymer patterns, produced by CFL on a thin polymer film on the flat PDMS substrate, acted as a mask to oxidize the uncovered regions of the PDMS. The chemical patterns were subsequently formed by gas phase evaporation of a fluorinated silane. After removal of the polymer, these stamps were used to transfer thiol inks to a gold substrate by µCP. Gold patterns at a scale of less than 100 nm were successfully replicated by these chemically patterned flat PDMS stamps.