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Microtexture and Grain Boundaries in Freestanding CVD Diamond Films: Growth and Twinning Mechanisms
Author(s) -
Liu Tao,
Raabe Dierk,
Mao Weimin,
Zaefferer Stefan
Publication year - 2009
Publication title -
advanced functional materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 6.069
H-Index - 322
eISSN - 1616-3028
pISSN - 1616-301X
DOI - 10.1002/adfm.200901231
Subject(s) - materials science , crystal twinning , chemical vapor deposition , diamond , grain boundary , substrate (aquarium) , diffraction , deposition (geology) , crystallography , composite material , optics , nanotechnology , microstructure , paleontology , oceanography , physics , chemistry , sediment , geology , biology
Three groups of free‐standing chemical vapor deposition (CVD) diamond films formed with variations in substrate temperature, methane concentration, and film thickness are analyzed using high‐resolution electron back‐scattering diffraction. Primarily {001}, {110}, and {111} fiber textures are observed. In addition, corresponding primary and higher order twinning components are found. As interfaces, high angle, low angle, primary twin, and secondary twin boundaries are observed. A growth and a twinning model are proposed based on the sp 3 hybridization of the bond in the CH 4 molecule that is used as the deposition medium.