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Pure‐Silica‐Zeolite MFI and MEL Low‐Dielectric‐Constant Films with Fluoro‐Organic Functionalization
Author(s) -
Lew Christopher M.,
Li Zijian,
Li Shuang,
Hwang SonJong,
Liu Yan,
Medina Dora I.,
Sun Minwei,
Wang Junlan,
Davis Mark E.,
Yan Yushan
Publication year - 2008
Publication title -
advanced functional materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 6.069
H-Index - 322
eISSN - 1616-3028
pISSN - 1616-301X
DOI - 10.1002/adfm.200800390
Subject(s) - materials science , zeolite , thermogravimetric analysis , surface modification , silane , adsorption , calcination , chemical engineering , contact angle , scanning electron microscope , dielectric , inorganic chemistry , organic chemistry , composite material , catalysis , chemistry , optoelectronics , engineering
Abstract The synthesis of organic‐functionalized pure‐silica‐zeolites (PSZs) with MFI‐ and MEL‐type structures for low‐ k applications prepared through a direct‐synthesis method by adding a fluorinated silane to the synthesis solution is reported. The added fluorine functionality increases the hydrophobicity of the zeolites, which are characterized by scanning electron microscopy, X‐ray diffraction, 29 Si and 19 F solid‐state NMR spectroscopy, nitrogen adsorption, and thermogravimetric analysis. The functionalized zeolite powders have low water content and calcined spin‐on films prepared from the functionalized nanoparticle suspensions exhibit higher water contact angles and lower k values (2.1 and 1.8 for the functionalized MFI‐ and MEL‐type zeolites, respectively) than PSZ films. The use of a direct‐synthesis method to decrease the moisture adsorption in the films eliminates the extra post‐spin‐on silylation steps that are traditionally used to render the zeolite films hydrophobic.