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Soft Imprinting: Creating Highly Ordered Porous Anodic Alumina Templates on Substrates for Nanofabrication
Author(s) -
Maria Chong A. S.,
Tan L. K.,
Deng J.,
Gao H.
Publication year - 2007
Publication title -
advanced functional materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 6.069
H-Index - 322
eISSN - 1616-3028
pISSN - 1616-301X
DOI - 10.1002/adfm.200600993
Subject(s) - materials science , template , nanolithography , fabrication , nanotechnology , anodizing , nanowire , etching (microfabrication) , polyimide , imprinting (psychology) , substrate (aquarium) , polymer , porosity , layer (electronics) , aluminium , composite material , chemistry , alternative medicine , pathology , medicine , biochemistry , oceanography , geology , gene
We demonstrate a “soft‐imprinting” method for the fabrication of highly ordered porous anodic alumina (HOPAA) templates on different substrates (such as Si, glass slides, and flexible polyimide films) over large areas (> 1.5 cm 2 ). In this process, Ar plasma etching is employed to soft imprint an evaporated Al film on the substrates using a free‐standing HOPAA template as a mask, thus creating ordered nanoindentations on the Al surface. The ordered nanoindentations in turn guide the subsequent anodization of Al to generate HOPAA templates on the substrates (HOPAA–substrates), which inherit the pattern of the free‐standing HOPAA mask. This soft‐imprinting technique is also applicable to the fabrication of HOPAA on flexible polymer films. To demonstrate the potential uses of the HOPAA–substrates in nanofabrication, highly ordered Au nanowire arrays are fabricated on a Si substrate and TiO 2 nanotube arrays are prepared on a glass substrate via solution‐ and vapor‐based fabrication processes, respectively.